Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001140361-21-042086-index-headers.html | 2021-12-16 17:14:25 | |
| 0001140361-21-042086-index.html | 2021-12-16 17:14:25 | |
| 0001140361-21-042086.txt | 2021-12-16 17:14:25 | |
 0001140361-21-042086-xbrl.zip | 178144 | 2021-12-16 17:14:25 |
| entg-20211214.xsd | 3923 | 2021-12-16 17:14:25 |
| entg-20211214_lab.xml | 22544 | 2021-12-16 17:14:25 |
| entg-20211214_pre.xml | 16042 | 2021-12-16 17:14:25 |
| FilingSummary.xml | 1776 | 2021-12-16 17:14:25 |
| Financial_Report.xlsx | 5672 | 2021-12-16 17:14:25 |
| MetaLinks.json | 20026 | 2021-12-16 17:14:25 |
| ny20001665x15_8k.htm | 60239 | 2021-12-16 17:14:25 |
| ny20001665x15_8k_htm.xml | 4051 | 2021-12-16 17:14:25 |
| ny20001665x15_ex2-1.htm | 675502 | 2021-12-16 17:14:25 |
 ny20001665x15_img1.jpg | 103469 | 2021-12-16 17:14:25 |
| R1.htm | 38581 | 2021-12-16 17:14:25 |
| report.css | 2767 | 2021-12-16 17:14:25 |
| Show.js | 1085 | 2021-12-16 17:14:25 |