Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-051610-index-headers.html | 2026-04-29 16:39:55 | |
| 0001104659-26-051610-index.html | 2026-04-29 16:39:55 | |
| 0001104659-26-051610.txt | 2026-04-29 16:39:55 | |
 0001104659-26-051610-xbrl.zip | 284836 | 2026-04-29 16:39:55 |
| entg-20260429.xsd | 3014 | 2026-04-29 16:39:55 |
| entg-20260429_lab.xml | 34239 | 2026-04-29 16:39:55 |
| entg-20260429_pre.xml | 22358 | 2026-04-29 16:39:55 |
| FilingSummary.xml | 1702 | 2026-04-29 16:39:55 |
| MetaLinks.json | 39239 | 2026-04-29 16:39:55 |
| R1.htm | 38061 | 2026-04-29 16:39:55 |
| report.css | 2766 | 2026-04-29 16:39:55 |
| Show.js | 1085 | 2026-04-29 16:39:55 |
| tm2613045d1_8k.htm | 34377 | 2026-04-29 16:39:55 |
 tm2613045d1_8kimg001.jpg | 10930 | 2026-04-29 16:39:55 |
| tm2613045d1_8k_htm.xml | 3083 | 2026-04-29 16:39:55 |
| tm2613045d1_ex10-1.htm | 1620762 | 2026-04-29 16:39:55 |