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|---|---|---|
 0001101302-26-000139-index-headers.html | 2026-07-15 07:14:55 | |
| 0001101302-26-000139-index.html | 2026-07-15 07:14:55 | |
| 0001101302-26-000139.txt | 2026-07-15 07:14:55 | |
 0001101302-26-000139-xbrl.zip | 43295 | 2026-07-15 07:14:55 |
 entegrislogoa42.gif | 12284 | 2026-07-15 07:14:55 |
| entg-20260715.htm | 29798 | 2026-07-15 07:14:55 |
| entg-20260715.xsd | 1882 | 2026-07-15 07:14:55 |
 entg-20260715_g1.jpg | 42851 | 2026-07-15 07:14:55 |
| entg-20260715_htm.xml | 2704 | 2026-07-15 07:14:55 |
| entg-20260715_lab.xml | 21880 | 2026-07-15 07:14:55 |
| entg-20260715_pre.xml | 12603 | 2026-07-15 07:14:55 |
| FilingSummary.xml | 1783 | 2026-07-15 07:14:55 |
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| newsreleaseannouncingq3202.htm | 8765 | 2026-07-15 07:14:55 |
| R1.htm | 38092 | 2026-07-15 07:14:55 |
| report.css | 2767 | 2026-07-15 07:14:55 |
| Show.js | 1085 | 2026-07-15 07:14:55 |