Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-26-000116-index-headers.html | 2026-05-11 16:17:06 | |
| 0001101302-26-000116-index.html | 2026-05-11 16:17:06 | |
| 0001101302-26-000116.txt | 2026-05-11 16:17:06 | |
 0001101302-26-000116-xbrl.zip | 56865 | 2026-05-11 16:17:06 |
| dwoodlandtsaexecutionversi.htm | 88630 | 2026-05-11 16:17:06 |
| entg-20260509.htm | 30672 | 2026-05-11 16:17:06 |
| entg-20260509.xsd | 1882 | 2026-05-11 16:17:06 |
 entg-20260509_g1.jpg | 42851 | 2026-05-11 16:17:06 |
| entg-20260509_htm.xml | 2704 | 2026-05-11 16:17:06 |
| entg-20260509_lab.xml | 21880 | 2026-05-11 16:17:06 |
| entg-20260509_pre.xml | 12603 | 2026-05-11 16:17:06 |
| FilingSummary.xml | 1783 | 2026-05-11 16:17:06 |
| MetaLinks.json | 17741 | 2026-05-11 16:17:06 |
| R1.htm | 38091 | 2026-05-11 16:17:06 |
| report.css | 2766 | 2026-05-11 16:17:06 |
| Show.js | 1085 | 2026-05-11 16:17:06 |