Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-26-000095-index-headers.html | 2026-04-15 07:14:48 | |
| 0001101302-26-000095-index.html | 2026-04-15 07:14:48 | |
| 0001101302-26-000095.txt | 2026-04-15 07:14:48 | |
 0001101302-26-000095-xbrl.zip | 43294 | 2026-04-15 07:14:48 |
 entegrislogoa42.gif | 12284 | 2026-04-15 07:14:48 |
| entg-20260415.htm | 28904 | 2026-04-15 07:14:48 |
| entg-20260415.xsd | 1882 | 2026-04-15 07:14:48 |
 entg-20260415_g1.jpg | 42851 | 2026-04-15 07:14:48 |
| entg-20260415_htm.xml | 2704 | 2026-04-15 07:14:48 |
| entg-20260415_lab.xml | 21880 | 2026-04-15 07:14:48 |
| entg-20260415_pre.xml | 12603 | 2026-04-15 07:14:48 |
| FilingSummary.xml | 1783 | 2026-04-15 07:14:48 |
| MetaLinks.json | 17741 | 2026-04-15 07:14:48 |
| newsreleaseannouncingq2202.htm | 9189 | 2026-04-15 07:14:48 |
| R1.htm | 38092 | 2026-04-15 07:14:48 |
| report.css | 2767 | 2026-04-15 07:14:48 |
| Show.js | 1085 | 2026-04-15 07:14:48 |