Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-26-000003-index-headers.html | 2026-01-14 07:31:18 | |
| 0001101302-26-000003-index.html | 2026-01-14 07:31:18 | |
| 0001101302-26-000003.txt | 2026-01-14 07:31:18 | |
 0001101302-26-000003-xbrl.zip | 43265 | 2026-01-14 07:31:18 |
 entegrislogoa42.gif | 12284 | 2026-01-14 07:31:18 |
| entg-20260114.htm | 28914 | 2026-01-14 07:31:18 |
| entg-20260114.xsd | 1882 | 2026-01-14 07:31:18 |
 entg-20260114_g1.jpg | 42851 | 2026-01-14 07:31:18 |
| entg-20260114_htm.xml | 2704 | 2026-01-14 07:31:18 |
| entg-20260114_lab.xml | 21880 | 2026-01-14 07:31:18 |
| entg-20260114_pre.xml | 12603 | 2026-01-14 07:31:18 |
| FilingSummary.xml | 1783 | 2026-01-14 07:31:18 |
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| newsreleaseannouncingq1202.htm | 9122 | 2026-01-14 07:31:18 |
| R1.htm | 38092 | 2026-01-14 07:31:18 |
| report.css | 2767 | 2026-01-14 07:31:18 |
| Show.js | 1085 | 2026-01-14 07:31:18 |