Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-25-000095-index-headers.html | 2025-10-15 07:33:08 | |
| 0001101302-25-000095-index.html | 2025-10-15 07:33:08 | |
| 0001101302-25-000095.txt | 2025-10-15 07:33:08 | |
 0001101302-25-000095-xbrl.zip | 43010 | 2025-10-15 07:33:08 |
 entegrislogoa42a.gif | 12284 | 2025-10-15 07:33:08 |
| entg-20251015.htm | 28916 | 2025-10-15 07:33:08 |
| entg-20251015.xsd | 1882 | 2025-10-15 07:33:08 |
 entg-20251015_g1.jpg | 42851 | 2025-10-15 07:33:08 |
| entg-20251015_htm.xml | 2704 | 2025-10-15 07:33:08 |
| entg-20251015_lab.xml | 21880 | 2025-10-15 07:33:08 |
| entg-20251015_pre.xml | 12603 | 2025-10-15 07:33:08 |
| FilingSummary.xml | 1783 | 2025-10-15 07:33:08 |
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| newsreleaseannouncingq4202.htm | 7562 | 2025-10-15 07:33:08 |
| R1.htm | 38092 | 2025-10-15 07:33:08 |
| report.css | 2767 | 2025-10-15 07:33:08 |
| Show.js | 1085 | 2025-10-15 07:33:08 |