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|---|---|---|
 0001101302-25-000070-index-headers.html | 2025-07-16 16:20:17 | |
| 0001101302-25-000070-index.html | 2025-07-16 16:20:17 | |
| 0001101302-25-000070.txt | 2025-07-16 16:20:17 | |
 0001101302-25-000070-xbrl.zip | 43242 | 2025-07-16 16:20:17 |
 entegrislogoa42.gif | 12284 | 2025-07-16 16:20:17 |
| entg-20250716.htm | 30040 | 2025-07-16 16:20:17 |
| entg-20250716.xsd | 1882 | 2025-07-16 16:20:17 |
 entg-20250716_g1.jpg | 42851 | 2025-07-16 16:20:17 |
| entg-20250716_htm.xml | 2706 | 2025-07-16 16:20:17 |
| entg-20250716_lab.xml | 21880 | 2025-07-16 16:20:17 |
| entg-20250716_pre.xml | 12603 | 2025-07-16 16:20:17 |
| FilingSummary.xml | 1785 | 2025-07-16 16:20:17 |
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| newsreleaseannouncingq3202.htm | 7530 | 2025-07-16 16:20:17 |
| R1.htm | 38094 | 2025-07-16 16:20:17 |
| report.css | 2767 | 2025-07-16 16:20:17 |
| Show.js | 1085 | 2025-07-16 16:20:17 |