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|---|---|---|
 0001101302-25-000010-index-headers.html | 2025-02-06 06:17:15 | |
| 0001101302-25-000010-index.html | 2025-02-06 06:17:15 | |
| 0001101302-25-000010.txt | 2025-02-06 06:17:15 | |
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 entegrislogoq42019.gif | 12284 | 2025-02-06 06:17:15 |
| entg-20250206.htm | 31044 | 2025-02-06 06:17:15 |
| entg-20250206.xsd | 1882 | 2025-02-06 06:17:15 |
 entg-20250206_g1.jpg | 42851 | 2025-02-06 06:17:15 |
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| FilingSummary.xml | 1785 | 2025-02-06 06:17:15 |
| Financial_Report.xlsx | 5704 | 2025-02-06 06:17:15 |
| MetaLinks.json | 17741 | 2025-02-06 06:17:15 |
| R1.htm | 38110 | 2025-02-06 06:17:15 |
| report.css | 2767 | 2025-02-06 06:17:15 |
| Show.js | 1085 | 2025-02-06 06:17:15 |