Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-25-000004-index-headers.html | 2025-01-15 07:08:52 | |
| 0001101302-25-000004-index.html | 2025-01-15 07:08:52 | |
| 0001101302-25-000004.txt | 2025-01-15 07:08:52 | |
 0001101302-25-000004-xbrl.zip | 43065 | 2025-01-15 07:08:52 |
 entegrislogoa42.gif | 12284 | 2025-01-15 07:08:52 |
| entg-20250115.htm | 30204 | 2025-01-15 07:08:52 |
| entg-20250115.xsd | 1882 | 2025-01-15 07:08:52 |
 entg-20250115_g1.jpg | 42851 | 2025-01-15 07:08:52 |
| entg-20250115_htm.xml | 2706 | 2025-01-15 07:08:52 |
| entg-20250115_lab.xml | 21885 | 2025-01-15 07:08:52 |
| entg-20250115_pre.xml | 12603 | 2025-01-15 07:08:52 |
| FilingSummary.xml | 1783 | 2025-01-15 07:08:52 |
| Financial_Report.xlsx | 5707 | 2025-01-15 07:08:52 |
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| newsreleaseannouncingq1202.htm | 7674 | 2025-01-15 07:08:52 |
| R1.htm | 38108 | 2025-01-15 07:08:52 |
| report.css | 2767 | 2025-01-15 07:08:52 |
| Show.js | 1085 | 2025-01-15 07:08:52 |