Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-24-000067-index-headers.html | 2024-10-17 18:21:45 | |
| 0001101302-24-000067-index.html | 2024-10-17 18:21:45 | |
| 0001101302-24-000067.txt | 2024-10-17 18:21:45 | |
 0001101302-24-000067-xbrl.zip | 41304 | 2024-10-17 18:21:45 |
| entg-20240905.htm | 26512 | 2024-10-17 18:21:45 |
| entg-20240905.xsd | 2001 | 2024-10-17 18:21:45 |
 entg-20240905_g1.jpg | 42851 | 2024-10-17 18:21:45 |
| entg-20240905_htm.xml | 2706 | 2024-10-17 18:21:45 |
| entg-20240905_lab.xml | 21880 | 2024-10-17 18:21:45 |
| entg-20240905_pre.xml | 12603 | 2024-10-17 18:21:45 |
| FilingSummary.xml | 1785 | 2024-10-17 18:21:45 |
| Financial_Report.xlsx | 5706 | 2024-10-17 18:21:45 |
| MetaLinks.json | 17741 | 2024-10-17 18:21:45 |
| R1.htm | 38109 | 2024-10-17 18:21:45 |
| report.css | 2767 | 2024-10-17 18:21:45 |
| Show.js | 1084 | 2024-10-17 18:21:45 |