Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-24-000047-index-headers.html | 2024-07-17 07:07:32 | |
| 0001101302-24-000047-index.html | 2024-07-17 07:07:32 | |
| 0001101302-24-000047.txt | 2024-07-17 07:07:32 | |
 0001101302-24-000047-xbrl.zip | 43058 | 2024-07-17 07:07:32 |
 entegrislogoa42.gif | 12284 | 2024-07-17 07:07:32 |
| entg-20240717.htm | 29172 | 2024-07-17 07:07:32 |
| entg-20240717.xsd | 2001 | 2024-07-17 07:07:32 |
 entg-20240717_g1.jpg | 42851 | 2024-07-17 07:07:32 |
| entg-20240717_htm.xml | 2706 | 2024-07-17 07:07:32 |
| entg-20240717_lab.xml | 21885 | 2024-07-17 07:07:32 |
| entg-20240717_pre.xml | 12603 | 2024-07-17 07:07:32 |
| FilingSummary.xml | 1783 | 2024-07-17 07:07:32 |
| Financial_Report.xlsx | 5707 | 2024-07-17 07:07:32 |
| MetaLinks.json | 17728 | 2024-07-17 07:07:32 |
| newsreleaseannouncingq3202.htm | 7922 | 2024-07-17 07:07:32 |
| R1.htm | 38109 | 2024-07-17 07:07:32 |
| report.css | 2767 | 2024-07-17 07:07:32 |
| Show.js | 1085 | 2024-07-17 07:07:32 |