Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-24-000029-index-headers.html | 2024-04-24 16:57:54 | |
| 0001101302-24-000029-index.html | 2024-04-24 16:57:54 | |
| 0001101302-24-000029.txt | 2024-04-24 16:57:54 | |
 0001101302-24-000029-xbrl.zip | 42357 | 2024-04-24 16:57:54 |
| entg-20240424.htm | 47996 | 2024-04-24 16:57:54 |
| entg-20240424.xsd | 2001 | 2024-04-24 16:57:54 |
 entg-20240424_g1.jpg | 42851 | 2024-04-24 16:57:54 |
| entg-20240424_htm.xml | 2704 | 2024-04-24 16:57:54 |
| entg-20240424_lab.xml | 21880 | 2024-04-24 16:57:54 |
| entg-20240424_pre.xml | 12603 | 2024-04-24 16:57:54 |
| FilingSummary.xml | 2001 | 2024-04-24 16:57:54 |
| Financial_Report.xlsx | 5703 | 2024-04-24 16:57:54 |
| MetaLinks.json | 17742 | 2024-04-24 16:57:54 |
| R1.htm | 38111 | 2024-04-24 16:57:54 |
| report.css | 2767 | 2024-04-24 16:57:54 |
| Show.js | 1084 | 2024-04-24 16:57:54 |