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|---|---|---|
 0001101302-24-000027-index-headers.html | 2024-04-17 07:05:14 | |
| 0001101302-24-000027-index.html | 2024-04-17 07:05:14 | |
| 0001101302-24-000027.txt | 2024-04-17 07:05:14 | |
 0001101302-24-000027-xbrl.zip | 43043 | 2024-04-17 07:05:14 |
 entegrislogoa42a.gif | 12284 | 2024-04-17 07:05:14 |
| entg-20240417.htm | 29171 | 2024-04-17 07:05:14 |
| entg-20240417.xsd | 2001 | 2024-04-17 07:05:14 |
 entg-20240417_g1.jpg | 42851 | 2024-04-17 07:05:14 |
| entg-20240417_htm.xml | 2706 | 2024-04-17 07:05:14 |
| entg-20240417_lab.xml | 21885 | 2024-04-17 07:05:14 |
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| FilingSummary.xml | 2001 | 2024-04-17 07:05:14 |
| Financial_Report.xlsx | 5705 | 2024-04-17 07:05:14 |
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| newsreleaseannouncingq2202.htm | 7920 | 2024-04-17 07:05:14 |
| R1.htm | 38113 | 2024-04-17 07:05:14 |
| report.css | 2767 | 2024-04-17 07:05:14 |
| Show.js | 1085 | 2024-04-17 07:05:14 |