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| 0001101302-24-000009-index.html | 2024-02-14 21:58:44 | |
| 0001101302-24-000009.txt | 2024-02-14 21:58:44 | |
 0001101302-24-000009-xbrl.zip | 656571 | 2024-02-14 21:58:44 |
| entg-12312023xex21.htm | 28355 | 2024-02-14 21:58:44 |
| entg-12312023xex23.htm | 2236 | 2024-02-14 21:58:44 |
| entg-12312023xex24.htm | 11282 | 2024-02-14 21:58:44 |
| entg-12312023xex311.htm | 9189 | 2024-02-14 21:58:44 |
| entg-12312023xex312.htm | 9169 | 2024-02-14 21:58:44 |
| entg-12312023xex321.htm | 4739 | 2024-02-14 21:58:44 |
| entg-12312023xex322.htm | 4742 | 2024-02-14 21:58:44 |
| entg-20231231.htm | 2736850 | 2024-02-14 21:58:44 |
| entg-20231231.xsd | 72938 | 2024-02-14 21:58:44 |
| entg-20231231_cal.xml | 120893 | 2024-02-14 21:58:44 |
| entg-20231231_def.xml | 434731 | 2024-02-14 21:58:44 |
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| entg-20231231_htm.xml | 2470982 | 2024-02-14 21:58:44 |
| entg-20231231_lab.xml | 1023470 | 2024-02-14 21:58:44 |
| entg-20231231_pre.xml | 721386 | 2024-02-14 21:58:44 |
| exhibit10382024arentegriss.htm | 243635 | 2024-02-14 21:58:44 |
| exhibit1039formofprsuagree.htm | 69154 | 2024-02-14 21:58:44 |
| exhibit1041formofstockopti.htm | 52310 | 2024-02-14 21:58:44 |
| exhibit10ormofglobalrsuawa.htm | 94291 | 2024-02-14 21:58:44 |
| exhibit97clawbackpolicy.htm | 34936 | 2024-02-14 21:58:44 |
| FilingSummary.xml | 63467 | 2024-02-14 21:58:44 |
| Financial_Report.xlsx | 189764 | 2024-02-14 21:58:44 |
| MetaLinks.json | 1164184 | 2024-02-14 21:58:44 |
| R1.htm | 68330 | 2024-02-14 21:58:44 |
| R10.htm | 36979 | 2024-02-14 21:58:44 |
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| R2.htm | 126568 | 2024-02-14 21:58:44 |
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| report.css | 2768 | 2024-02-14 21:58:44 |
| Show.js | 1086 | 2024-02-14 21:58:44 |