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|---|---|---|
 0001101302-24-000002-index-headers.html | 2024-01-17 07:02:47 | |
| 0001101302-24-000002-index.html | 2024-01-17 07:02:47 | |
| 0001101302-24-000002.txt | 2024-01-17 07:02:47 | |
 0001101302-24-000002-xbrl.zip | 43018 | 2024-01-17 07:02:47 |
 entegrislogoa42.gif | 12284 | 2024-01-17 07:02:47 |
| entg-20240117.htm | 29943 | 2024-01-17 07:02:47 |
| entg-20240117.xsd | 2001 | 2024-01-17 07:02:47 |
 entg-20240117_g1.jpg | 42851 | 2024-01-17 07:02:47 |
| entg-20240117_htm.xml | 2706 | 2024-01-17 07:02:47 |
| entg-20240117_lab.xml | 24139 | 2024-01-17 07:02:47 |
| entg-20240117_pre.xml | 12603 | 2024-01-17 07:02:47 |
| FilingSummary.xml | 1783 | 2024-01-17 07:02:47 |
| Financial_Report.xlsx | 5708 | 2024-01-17 07:02:47 |
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| newsreleaseannouncingq1202.htm | 7046 | 2024-01-17 07:02:47 |
| R1.htm | 38110 | 2024-01-17 07:02:47 |
| report.css | 2767 | 2024-01-17 07:02:47 |
| Show.js | 1085 | 2024-01-17 07:02:47 |