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|---|---|---|
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| 0001101302-23-000084-index.html | 2023-10-18 07:05:48 | |
| 0001101302-23-000084.txt | 2023-10-18 07:05:48 | |
 0001101302-23-000084-xbrl.zip | 43037 | 2023-10-18 07:05:48 |
 entegrislogoa42.gif | 12284 | 2023-10-18 07:05:48 |
| entg-20231018.htm | 29943 | 2023-10-18 07:05:48 |
| entg-20231018.xsd | 2001 | 2023-10-18 07:05:48 |
 entg-20231018_g1.jpg | 42851 | 2023-10-18 07:05:48 |
| entg-20231018_htm.xml | 2706 | 2023-10-18 07:05:48 |
| entg-20231018_lab.xml | 24139 | 2023-10-18 07:05:48 |
| entg-20231018_pre.xml | 12603 | 2023-10-18 07:05:48 |
| FilingSummary.xml | 1783 | 2023-10-18 07:05:48 |
| Financial_Report.xlsx | 5707 | 2023-10-18 07:05:48 |
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| newsreleaseannouncingq4202.htm | 7080 | 2023-10-18 07:05:48 |
| R1.htm | 38110 | 2023-10-18 07:05:48 |
| report.css | 2767 | 2023-10-18 07:05:48 |
| Show.js | 1085 | 2023-10-18 07:05:48 |