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|---|---|---|
 0001101302-23-000074-index-headers.html | 2023-07-19 07:21:41 | |
| 0001101302-23-000074-index.html | 2023-07-19 07:21:41 | |
| 0001101302-23-000074.txt | 2023-07-19 07:21:41 | |
 0001101302-23-000074-xbrl.zip | 43019 | 2023-07-19 07:21:41 |
 entegrislogoa42.gif | 12284 | 2023-07-19 07:21:41 |
| entg-20230719.htm | 30130 | 2023-07-19 07:21:41 |
| entg-20230719.xsd | 2001 | 2023-07-19 07:21:41 |
 entg-20230719_g1.jpg | 42851 | 2023-07-19 07:21:41 |
| entg-20230719_htm.xml | 2706 | 2023-07-19 07:21:41 |
| entg-20230719_lab.xml | 24139 | 2023-07-19 07:21:41 |
| entg-20230719_pre.xml | 12603 | 2023-07-19 07:21:41 |
| FilingSummary.xml | 2029 | 2023-07-19 07:21:41 |
| Financial_Report.xlsx | 5707 | 2023-07-19 07:21:41 |
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| newsreleaseannouncingq3202.htm | 7073 | 2023-07-19 07:21:41 |
| R1.htm | 38110 | 2023-07-19 07:21:41 |
| report.css | 2767 | 2023-07-19 07:21:41 |
| Show.js | 1085 | 2023-07-19 07:21:41 |