Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-23-000056-index-headers.html | 2023-04-26 16:58:22 | |
| 0001101302-23-000056-index.html | 2023-04-26 16:58:22 | |
| 0001101302-23-000056.txt | 2023-04-26 16:58:22 | |
 0001101302-23-000056-xbrl.zip | 43869 | 2023-04-26 16:58:22 |
| entg-20230426.htm | 56261 | 2023-04-26 16:58:22 |
| entg-20230426.xsd | 1999 | 2023-04-26 16:58:22 |
 entg-20230426_g1.jpg | 42851 | 2023-04-26 16:58:22 |
| entg-20230426_htm.xml | 10870 | 2023-04-26 16:58:22 |
| entg-20230426_lab.xml | 24132 | 2023-04-26 16:58:22 |
| entg-20230426_pre.xml | 12601 | 2023-04-26 16:58:22 |
| FilingSummary.xml | 1981 | 2023-04-26 16:58:22 |
| Financial_Report.xlsx | 5703 | 2023-04-26 16:58:22 |
| MetaLinks.json | 17840 | 2023-04-26 16:58:22 |
| R1.htm | 38108 | 2023-04-26 16:58:22 |
| report.css | 2767 | 2023-04-26 16:58:22 |
| Show.js | 1084 | 2023-04-26 16:58:22 |