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| 0001101302-23-000054-index.html | 2023-04-19 09:11:54 | |
| 0001101302-23-000054.txt | 2023-04-19 09:11:54 | |
 0001101302-23-000054-xbrl.zip | 44466 | 2023-04-19 09:11:54 |
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| entg-20230419.htm | 37451 | 2023-04-19 09:11:54 |
| entg-20230419.xsd | 1999 | 2023-04-19 09:11:54 |
 entg-20230419_g1.jpg | 42851 | 2023-04-19 09:11:54 |
| entg-20230419_htm.xml | 10877 | 2023-04-19 09:11:54 |
| entg-20230419_lab.xml | 24137 | 2023-04-19 09:11:54 |
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| R1.htm | 38110 | 2023-04-19 09:11:54 |
| report.css | 2767 | 2023-04-19 09:11:54 |
| Show.js | 1085 | 2023-04-19 09:11:54 |