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|---|---|---|
 0001101302-23-000023-index-headers.html | 2023-02-27 16:51:55 | |
| 0001101302-23-000023-index.html | 2023-02-27 16:51:55 | |
| 0001101302-23-000023.txt | 2023-02-27 16:51:55 | |
 0001101302-23-000023-xbrl.zip | 45995 | 2023-02-27 16:51:55 |
| a20230223jimandersonpressr.htm | 10195 | 2023-02-27 16:51:55 |
| entg-20230227.htm | 39811 | 2023-02-27 16:51:55 |
| entg-20230227.xsd | 1999 | 2023-02-27 16:51:55 |
 entg-20230227_g1.jpg | 42851 | 2023-02-27 16:51:55 |
| entg-20230227_htm.xml | 10870 | 2023-02-27 16:51:55 |
| entg-20230227_lab.xml | 24132 | 2023-02-27 16:51:55 |
| entg-20230227_pre.xml | 12601 | 2023-02-27 16:51:55 |
| FilingSummary.xml | 2029 | 2023-02-27 16:51:55 |
| Financial_Report.xlsx | 5704 | 2023-02-27 16:51:55 |
| MetaLinks.json | 17840 | 2023-02-27 16:51:55 |
 picture1a.jpg | 3648 | 2023-02-27 16:51:55 |
 picture2a.jpg | 1798 | 2023-02-27 16:51:55 |
| R1.htm | 38108 | 2023-02-27 16:51:55 |
| report.css | 2767 | 2023-02-27 16:51:55 |
| Show.js | 1085 | 2023-02-27 16:51:55 |