Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001101302-23-000008-index.html | 2023-01-20 08:36:06 | |
| 0001101302-23-000008.txt | 2023-01-20 08:36:06 | |
 0001101302-23-000008-xbrl.zip | 47574 | 2023-01-20 08:36:06 |
| entg-20230119.htm | 41076 | 2023-01-20 08:36:06 |
| entg-20230119.xsd | 1999 | 2023-01-20 08:36:06 |
 entg-20230119_g1.jpg | 42851 | 2023-01-20 08:36:06 |
| entg-20230119_htm.xml | 10870 | 2023-01-20 08:36:06 |
| entg-20230119_lab.xml | 25133 | 2023-01-20 08:36:06 |
| entg-20230119_pre.xml | 13136 | 2023-01-20 08:36:06 |
| FilingSummary.xml | 2029 | 2023-01-20 08:36:06 |
| Financial_Report.xlsx | 5703 | 2023-01-20 08:36:06 |
 image1a.jpg | 7370 | 2023-01-20 08:36:06 |
 imagea.jpg | 11948 | 2023-01-20 08:36:06 |
| MetaLinks.json | 18399 | 2023-01-20 08:36:06 |
| qedsigningjointpressreleas.htm | 13431 | 2023-01-20 08:36:06 |
| R1.htm | 38108 | 2023-01-20 08:36:06 |
| report.css | 2767 | 2023-01-20 08:36:06 |
| Show.js | 1085 | 2023-01-20 08:36:06 |