Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-23-000005-index-headers.html | 2023-01-18 08:03:28 | |
| 0001101302-23-000005-index.html | 2023-01-18 08:03:28 | |
| 0001101302-23-000005.txt | 2023-01-18 08:03:28 | |
 0001101302-23-000005-xbrl.zip | 44627 | 2023-01-18 08:03:28 |
 entegrislogoa42a.gif | 12284 | 2023-01-18 08:03:28 |
| entg-20230118.htm | 37524 | 2023-01-18 08:03:28 |
| entg-20230118.xsd | 1999 | 2023-01-18 08:03:28 |
 entg-20230118_g1.jpg | 42851 | 2023-01-18 08:03:28 |
| entg-20230118_htm.xml | 10877 | 2023-01-18 08:03:28 |
| entg-20230118_lab.xml | 24137 | 2023-01-18 08:03:28 |
| entg-20230118_pre.xml | 12601 | 2023-01-18 08:03:28 |
| FilingSummary.xml | 2029 | 2023-01-18 08:03:28 |
| Financial_Report.xlsx | 5707 | 2023-01-18 08:03:28 |
| MetaLinks.json | 17827 | 2023-01-18 08:03:28 |
| newsreleaseannouncingq1202.htm | 7931 | 2023-01-18 08:03:28 |
| R1.htm | 38110 | 2023-01-18 08:03:28 |
| report.css | 2767 | 2023-01-18 08:03:28 |
| Show.js | 1085 | 2023-01-18 08:03:28 |