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|---|---|---|
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| 0001101302-22-000044-index.html | 2022-10-19 07:56:24 | |
| 0001101302-22-000044.txt | 2022-10-19 07:56:24 | |
 0001101302-22-000044-xbrl.zip | 44371 | 2022-10-19 07:56:24 |
 entegrislogoa42.gif | 12284 | 2022-10-19 07:56:24 |
| entg-20221019.htm | 36916 | 2022-10-19 07:56:24 |
| entg-20221019.xsd | 1999 | 2022-10-19 07:56:24 |
 entg-20221019_g1.jpg | 42851 | 2022-10-19 07:56:24 |
| entg-20221019_htm.xml | 10877 | 2022-10-19 07:56:24 |
| entg-20221019_lab.xml | 24137 | 2022-10-19 07:56:24 |
| entg-20221019_pre.xml | 12601 | 2022-10-19 07:56:24 |
| FilingSummary.xml | 2031 | 2022-10-19 07:56:24 |
| Financial_Report.xlsx | 5706 | 2022-10-19 07:56:24 |
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| newsreleaseannouncingq4202.htm | 7000 | 2022-10-19 07:56:24 |
| R1.htm | 38112 | 2022-10-19 07:56:24 |
| report.css | 2767 | 2022-10-19 07:56:24 |
| Show.js | 1085 | 2022-10-19 07:56:24 |