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|---|---|---|
 0001101302-22-000038-index-headers.html | 2022-08-02 06:07:08 | |
| 0001101302-22-000038-index.html | 2022-08-02 06:07:08 | |
| 0001101302-22-000038.txt | 2022-08-02 06:07:08 | |
 0001101302-22-000038-xbrl.zip | 68595 | 2022-08-02 06:07:08 |
 entegrislogoq42019a.gif | 12284 | 2022-08-02 06:07:08 |
| entg-20220802.htm | 38919 | 2022-08-02 06:07:08 |
| entg-20220802.xsd | 1999 | 2022-08-02 06:07:08 |
 entg-20220802_g1.jpg | 42851 | 2022-08-02 06:07:08 |
| entg-20220802_htm.xml | 10870 | 2022-08-02 06:07:08 |
| entg-20220802_lab.xml | 24132 | 2022-08-02 06:07:08 |
| entg-20220802_pre.xml | 12601 | 2022-08-02 06:07:08 |
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 entgq222slides002.jpg | 276133 | 2022-08-02 06:07:08 |
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 entgq222slides019.jpg | 107160 | 2022-08-02 06:07:08 |
 entgq222slides020.jpg | 106643 | 2022-08-02 06:07:08 |
| FilingSummary.xml | 1839 | 2022-08-02 06:07:08 |
| Financial_Report.xlsx | 5704 | 2022-08-02 06:07:08 |
| MetaLinks.json | 17308 | 2022-08-02 06:07:08 |
| R1.htm | 38562 | 2022-08-02 06:07:08 |
| report.css | 2767 | 2022-08-02 06:07:08 |
| Show.js | 1085 | 2022-08-02 06:07:08 |