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|---|---|---|
 0001101302-22-000036-index-headers.html | 2022-07-20 08:03:27 | |
| 0001101302-22-000036-index.html | 2022-07-20 08:03:27 | |
| 0001101302-22-000036.txt | 2022-07-20 08:03:27 | |
 0001101302-22-000036-xbrl.zip | 44425 | 2022-07-20 08:03:27 |
 entegrislogoa42.gif | 12284 | 2022-07-20 08:03:27 |
| entg-20220720.htm | 37618 | 2022-07-20 08:03:27 |
| entg-20220720.xsd | 1999 | 2022-07-20 08:03:27 |
 entg-20220720_g1.jpg | 42851 | 2022-07-20 08:03:27 |
| entg-20220720_htm.xml | 11202 | 2022-07-20 08:03:27 |
| entg-20220720_lab.xml | 24137 | 2022-07-20 08:03:27 |
| entg-20220720_pre.xml | 12601 | 2022-07-20 08:03:27 |
| FilingSummary.xml | 1814 | 2022-07-20 08:03:27 |
| Financial_Report.xlsx | 5829 | 2022-07-20 08:03:27 |
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| newsreleaseannouncingq3202.htm | 6992 | 2022-07-20 08:03:27 |
| R1.htm | 39596 | 2022-07-20 08:03:27 |
| report.css | 2767 | 2022-07-20 08:03:27 |
| Show.js | 1085 | 2022-07-20 08:03:27 |