Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-22-000026-index-headers.html | 2022-04-27 16:37:36 | |
| 0001101302-22-000026-index.html | 2022-04-27 16:37:36 | |
| 0001101302-22-000026.txt | 2022-04-27 16:37:36 | |
 0001101302-22-000026-xbrl.zip | 43609 | 2022-04-27 16:37:36 |
| entg-20220427.htm | 54027 | 2022-04-27 16:37:36 |
| entg-20220427.xsd | 2011 | 2022-04-27 16:37:36 |
 entg-20220427_g1.jpg | 42851 | 2022-04-27 16:37:36 |
| entg-20220427_htm.xml | 10876 | 2022-04-27 16:37:36 |
| entg-20220427_lab.xml | 24270 | 2022-04-27 16:37:36 |
| entg-20220427_pre.xml | 12739 | 2022-04-27 16:37:36 |
| FilingSummary.xml | 1772 | 2022-04-27 16:37:36 |
| Financial_Report.xlsx | 5680 | 2022-04-27 16:37:36 |
| MetaLinks.json | 17628 | 2022-04-27 16:37:36 |
| R1.htm | 38762 | 2022-04-27 16:37:36 |
| report.css | 2767 | 2022-04-27 16:37:36 |
| Show.js | 1084 | 2022-04-27 16:37:36 |