Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-22-000018-index-headers.html | 2022-04-20 08:06:03 | |
| 0001101302-22-000018-index.html | 2022-04-20 08:06:03 | |
| 0001101302-22-000018.txt | 2022-04-20 08:06:03 | |
 0001101302-22-000018-xbrl.zip | 44389 | 2022-04-20 08:06:03 |
 entegrislogoa42.gif | 12284 | 2022-04-20 08:06:03 |
| entg-20220420.htm | 37310 | 2022-04-20 08:06:03 |
| entg-20220420.xsd | 2011 | 2022-04-20 08:06:03 |
 entg-20220420_g1.jpg | 42851 | 2022-04-20 08:06:03 |
| entg-20220420_htm.xml | 10883 | 2022-04-20 08:06:03 |
| entg-20220420_lab.xml | 24275 | 2022-04-20 08:06:03 |
| entg-20220420_pre.xml | 12739 | 2022-04-20 08:06:03 |
| FilingSummary.xml | 1820 | 2022-04-20 08:06:03 |
| Financial_Report.xlsx | 5684 | 2022-04-20 08:06:03 |
| MetaLinks.json | 17615 | 2022-04-20 08:06:03 |
| newsreleaseannouncingq2202.htm | 6987 | 2022-04-20 08:06:03 |
| R1.htm | 38764 | 2022-04-20 08:06:03 |
| report.css | 2767 | 2022-04-20 08:06:03 |
| Show.js | 1085 | 2022-04-20 08:06:03 |