Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-22-000016-index-headers.html | 2022-04-08 16:24:13 | |
| 0001101302-22-000016-index.html | 2022-04-08 16:24:13 | |
| 0001101302-22-000016.txt | 2022-04-08 16:24:13 | |
 0001101302-22-000016-xbrl.zip | 42665 | 2022-04-08 16:24:13 |
| entg-20220406.htm | 33147 | 2022-04-08 16:24:13 |
| entg-20220406.xsd | 2011 | 2022-04-08 16:24:13 |
 entg-20220406_g1.jpg | 42851 | 2022-04-08 16:24:13 |
| entg-20220406_htm.xml | 10819 | 2022-04-08 16:24:13 |
| entg-20220406_lab.xml | 24275 | 2022-04-08 16:24:13 |
| entg-20220406_pre.xml | 12739 | 2022-04-08 16:24:13 |
| FilingSummary.xml | 1772 | 2022-04-08 16:24:13 |
| Financial_Report.xlsx | 5685 | 2022-04-08 16:24:13 |
| MetaLinks.json | 17615 | 2022-04-08 16:24:13 |
| R1.htm | 38765 | 2022-04-08 16:24:13 |
| report.css | 2767 | 2022-04-08 16:24:13 |
| Show.js | 1084 | 2022-04-08 16:24:13 |