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|---|---|---|
 0001101302-22-000002-index-headers.html | 2022-01-19 17:04:38 | |
| 0001101302-22-000002-index.html | 2022-01-19 17:04:38 | |
| 0001101302-22-000002.txt | 2022-01-19 17:04:38 | |
 0001101302-22-000002-xbrl.zip | 44436 | 2022-01-19 17:04:38 |
 entegrislogoa42.gif | 12284 | 2022-01-19 17:04:38 |
| entg-20220119.htm | 38140 | 2022-01-19 17:04:38 |
| entg-20220119.xsd | 2011 | 2022-01-19 17:04:38 |
 entg-20220119_g1.jpg | 42851 | 2022-01-19 17:04:38 |
| entg-20220119_htm.xml | 10883 | 2022-01-19 17:04:38 |
| entg-20220119_lab.xml | 24275 | 2022-01-19 17:04:38 |
| entg-20220119_pre.xml | 12739 | 2022-01-19 17:04:38 |
| FilingSummary.xml | 1810 | 2022-01-19 17:04:38 |
| Financial_Report.xlsx | 5684 | 2022-01-19 17:04:38 |
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| newsreleaseannouncingq1202.htm | 7072 | 2022-01-19 17:04:38 |
| R1.htm | 38632 | 2022-01-19 17:04:38 |
| report.css | 2767 | 2022-01-19 17:04:38 |
| Show.js | 1085 | 2022-01-19 17:04:38 |