Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-21-000085-index-headers.html | 2021-12-22 16:02:34 | |
| 0001101302-21-000085-index.html | 2021-12-22 16:02:34 | |
| 0001101302-21-000085.txt | 2021-12-22 16:02:34 | |
 0001101302-21-000085-xbrl.zip | 42541 | 2021-12-22 16:02:34 |
| entg-20211218.htm | 32856 | 2021-12-22 16:02:34 |
| entg-20211218.xsd | 2011 | 2021-12-22 16:02:34 |
 entg-20211218_g1.jpg | 42851 | 2021-12-22 16:02:34 |
| entg-20211218_htm.xml | 10819 | 2021-12-22 16:02:34 |
| entg-20211218_lab.xml | 24275 | 2021-12-22 16:02:34 |
| entg-20211218_pre.xml | 12739 | 2021-12-22 16:02:34 |
| FilingSummary.xml | 1762 | 2021-12-22 16:02:34 |
| Financial_Report.xlsx | 5683 | 2021-12-22 16:02:34 |
| MetaLinks.json | 17616 | 2021-12-22 16:02:34 |
| R1.htm | 38632 | 2021-12-22 16:02:34 |
| report.css | 2767 | 2021-12-22 16:02:34 |
| Show.js | 1084 | 2021-12-22 16:02:34 |