Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-21-000081-index-headers.html | 2021-10-27 09:07:35 | |
| 0001101302-21-000081-index.html | 2021-10-27 09:07:35 | |
| 0001101302-21-000081.txt | 2021-10-27 09:07:35 | |
 0001101302-21-000081-xbrl.zip | 46063 | 2021-10-27 09:07:35 |
 basflogo.jpg | 6334 | 2021-10-27 09:07:35 |
 entegrislogo.jpg | 14445 | 2021-10-27 09:07:35 |
| entg-20211027.htm | 37780 | 2021-10-27 09:07:35 |
| entg-20211027.xsd | 2011 | 2021-10-27 09:07:35 |
 entg-20211027_g1.jpg | 42851 | 2021-10-27 09:07:35 |
| entg-20211027_htm.xml | 10870 | 2021-10-27 09:07:35 |
| entg-20211027_lab.xml | 24275 | 2021-10-27 09:07:35 |
| entg-20211027_pre.xml | 12739 | 2021-10-27 09:07:35 |
| FilingSummary.xml | 1809 | 2021-10-27 09:07:35 |
| Financial_Report.xlsx | 5683 | 2021-10-27 09:07:35 |
| MetaLinks.json | 17615 | 2021-10-27 09:07:35 |
| projectpuck-signingpressre.htm | 15326 | 2021-10-27 09:07:35 |
| R1.htm | 38633 | 2021-10-27 09:07:35 |
| report.css | 2767 | 2021-10-27 09:07:35 |
| Show.js | 1085 | 2021-10-27 09:07:35 |