Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-21-000044-index-headers.html | 2021-04-29 16:09:38 | |
| 0001101302-21-000044-index.html | 2021-04-29 16:09:38 | |
| 0001101302-21-000044.txt | 2021-04-29 16:09:38 | |
 0001101302-21-000044-xbrl.zip | 44886 | 2021-04-29 16:09:38 |
| entg-20210429.htm | 56716 | 2021-04-29 16:09:38 |
| entg-20210429.xsd | 2520 | 2021-04-29 16:09:38 |
| entg-20210429_cal.xml | 803 | 2021-04-29 16:09:38 |
| entg-20210429_def.xml | 1767 | 2021-04-29 16:09:38 |
 entg-20210429_g1.jpg | 42851 | 2021-04-29 16:09:38 |
| entg-20210429_htm.xml | 10811 | 2021-04-29 16:09:38 |
| entg-20210429_lab.xml | 24270 | 2021-04-29 16:09:38 |
| entg-20210429_pre.xml | 12739 | 2021-04-29 16:09:38 |
| FilingSummary.xml | 1838 | 2021-04-29 16:09:38 |
| Financial_Report.xlsx | 5681 | 2021-04-29 16:09:38 |
| MetaLinks.json | 18051 | 2021-04-29 16:09:38 |
| R1.htm | 38630 | 2021-04-29 16:09:38 |
| report.css | 2767 | 2021-04-29 16:09:38 |
| Show.js | 1085 | 2021-04-29 16:09:38 |