Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-21-000042-index-headers.html | 2021-04-29 16:04:45 | |
| 0001101302-21-000042-index.html | 2021-04-29 16:04:45 | |
| 0001101302-21-000042.txt | 2021-04-29 16:04:45 | |
 0001101302-21-000042-xbrl.zip | 44060 | 2021-04-29 16:04:45 |
| entg-20210217.htm | 34193 | 2021-04-29 16:04:45 |
| entg-20210217.xsd | 2520 | 2021-04-29 16:04:45 |
| entg-20210217_cal.xml | 803 | 2021-04-29 16:04:45 |
| entg-20210217_def.xml | 1767 | 2021-04-29 16:04:45 |
 entg-20210217_g1.jpg | 42851 | 2021-04-29 16:04:45 |
| entg-20210217_htm.xml | 11687 | 2021-04-29 16:04:45 |
| entg-20210217_lab.xml | 25236 | 2021-04-29 16:04:45 |
| entg-20210217_pre.xml | 13268 | 2021-04-29 16:04:45 |
| FilingSummary.xml | 1840 | 2021-04-29 16:04:45 |
| Financial_Report.xlsx | 5955 | 2021-04-29 16:04:45 |
| MetaLinks.json | 18581 | 2021-04-29 16:04:45 |
| R1.htm | 40641 | 2021-04-29 16:04:45 |
| report.css | 2767 | 2021-04-29 16:04:45 |
| Show.js | 1085 | 2021-04-29 16:04:45 |