Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-21-000030-index-headers.html | 2021-04-14 08:11:27 | |
| 0001101302-21-000030-index.html | 2021-04-14 08:11:27 | |
| 0001101302-21-000030.txt | 2021-04-14 08:11:27 | |
 0001101302-21-000030-xbrl.zip | 13581 | 2021-04-14 08:11:27 |
 entegrislogoa421.gif | 12284 | 2021-04-14 08:11:27 |
| entg-20210414.htm | 38787 | 2021-04-14 08:11:27 |
| entg-20210414.xsd | 2520 | 2021-04-14 08:11:27 |
| entg-20210414_cal.xml | 803 | 2021-04-14 08:11:27 |
| entg-20210414_def.xml | 1767 | 2021-04-14 08:11:27 |
| entg-20210414_htm.xml | 10759 | 2021-04-14 08:11:27 |
| entg-20210414_lab.xml | 24275 | 2021-04-14 08:11:27 |
| entg-20210414_pre.xml | 12739 | 2021-04-14 08:11:27 |
| FilingSummary.xml | 1826 | 2021-04-14 08:11:27 |
| Financial_Report.xlsx | 5685 | 2021-04-14 08:11:27 |
| MetaLinks.json | 18038 | 2021-04-14 08:11:27 |
| newsreleaseannouncingq2202.htm | 6212 | 2021-04-14 08:11:27 |
| R1.htm | 38633 | 2021-04-14 08:11:27 |
| report.css | 2767 | 2021-04-14 08:11:27 |
| Show.js | 1085 | 2021-04-14 08:11:27 |