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| 0001101302-21-000011-index.html | 2021-02-05 12:55:20 | |
| 0001101302-21-000011.txt | 2021-02-05 12:55:20 | |
 0001101302-21-000011-xbrl.zip | 676448 | 2021-02-05 12:55:20 |
| entg-12312020xex21.htm | 21889 | 2021-02-05 12:55:20 |
| entg-12312020xex23.htm | 4329 | 2021-02-05 12:55:20 |
| entg-12312020xex24.htm | 12478 | 2021-02-05 12:55:20 |
| entg-12312020xex311.htm | 9319 | 2021-02-05 12:55:20 |
| entg-12312020xex312.htm | 9311 | 2021-02-05 12:55:20 |
| entg-12312020xex321.htm | 4874 | 2021-02-05 12:55:20 |
| entg-12312020xex322.htm | 4889 | 2021-02-05 12:55:20 |
| entg-20201231.htm | 3451684 | 2021-02-05 12:55:20 |
| entg-20201231.xsd | 66056 | 2021-02-05 12:55:20 |
| entg-20201231_cal.xml | 151433 | 2021-02-05 12:55:20 |
| entg-20201231_def.xml | 391735 | 2021-02-05 12:55:20 |
 entg-20201231_g1.jpg | 42851 | 2021-02-05 12:55:20 |
 entg-20201231_g2.jpg | 138693 | 2021-02-05 12:55:20 |
| entg-20201231_htm.xml | 2930198 | 2021-02-05 12:55:20 |
| entg-20201231_lab.xml | 885898 | 2021-02-05 12:55:20 |
| entg-20201231_pre.xml | 643224 | 2021-02-05 12:55:20 |
| exhibit101-rsuawardagreeme.htm | 45543 | 2021-02-05 12:55:20 |
| exhibit102-performanceshar.htm | 55042 | 2021-02-05 12:55:20 |
| exhibit103-rsuawardagreeme.htm | 46723 | 2021-02-05 12:55:20 |
| exhibit104-stockoptiongran.htm | 46063 | 2021-02-05 12:55:20 |
| FilingSummary.xml | 60780 | 2021-02-05 12:55:20 |
| Financial_Report.xlsx | 151639 | 2021-02-05 12:55:20 |
| MetaLinks.json | 905126 | 2021-02-05 12:55:20 |
| R1.htm | 61073 | 2021-02-05 12:55:20 |
| R10.htm | 21136 | 2021-02-05 12:55:20 |
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| report.css | 2768 | 2021-02-05 12:55:20 |
| Show.js | 1086 | 2021-02-05 12:55:20 |