Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-21-000002-index-headers.html | 2021-01-13 08:00:46 | |
| 0001101302-21-000002-index.html | 2021-01-13 08:00:46 | |
| 0001101302-21-000002.txt | 2021-01-13 08:00:46 | |
 0001101302-21-000002-xbrl.zip | 13619 | 2021-01-13 08:00:46 |
 entegrislogoa421.gif | 12284 | 2021-01-13 08:00:46 |
| entg-20210113.htm | 39844 | 2021-01-13 08:00:46 |
| entg-20210113.xsd | 2520 | 2021-01-13 08:00:46 |
| entg-20210113_cal.xml | 803 | 2021-01-13 08:00:46 |
| entg-20210113_def.xml | 1767 | 2021-01-13 08:00:46 |
| entg-20210113_htm.xml | 10759 | 2021-01-13 08:00:46 |
| entg-20210113_lab.xml | 24275 | 2021-01-13 08:00:46 |
| entg-20210113_pre.xml | 12739 | 2021-01-13 08:00:46 |
| FilingSummary.xml | 1826 | 2021-01-13 08:00:46 |
| Financial_Report.xlsx | 5464 | 2021-01-13 08:00:46 |
| MetaLinks.json | 18038 | 2021-01-13 08:00:46 |
| pressreleaseannouncingq120.htm | 6222 | 2021-01-13 08:00:46 |
| R1.htm | 38633 | 2021-01-13 08:00:46 |
| report.css | 2767 | 2021-01-13 08:00:46 |
| Show.js | 1085 | 2021-01-13 08:00:46 |