Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-20-000052-index-headers.html | 2020-10-14 07:59:15 | |
| 0001101302-20-000052-index.html | 2020-10-14 07:59:15 | |
| 0001101302-20-000052.txt | 2020-10-14 07:59:15 | |
 0001101302-20-000052-xbrl.zip | 13843 | 2020-10-14 07:59:15 |
 entegrislogoa4211.gif | 12284 | 2020-10-14 07:59:15 |
| entg-20201014.htm | 50116 | 2020-10-14 07:59:15 |
| entg-20201014.xsd | 2520 | 2020-10-14 07:59:15 |
| entg-20201014_cal.xml | 803 | 2020-10-14 07:59:15 |
| entg-20201014_def.xml | 1767 | 2020-10-14 07:59:15 |
| entg-20201014_htm.xml | 10759 | 2020-10-14 07:59:15 |
| entg-20201014_lab.xml | 24275 | 2020-10-14 07:59:15 |
| entg-20201014_pre.xml | 12739 | 2020-10-14 07:59:15 |
| FilingSummary.xml | 1822 | 2020-10-14 07:59:15 |
| Financial_Report.xlsx | 5464 | 2020-10-14 07:59:15 |
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| pressreleaseannouncing.htm | 8098 | 2020-10-14 07:59:15 |
| R1.htm | 38633 | 2020-10-14 07:59:15 |
| report.css | 2767 | 2020-10-14 07:59:15 |
| Show.js | 1085 | 2020-10-14 07:59:15 |