Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-20-000024-index-headers.html | 2020-04-21 06:04:23 | |
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| 0001101302-20-000024.txt | 2020-04-21 06:04:23 | |
 0001101302-20-000024-xbrl.zip | 41969 | 2020-04-21 06:04:23 |
 entegrislogoq420191.gif | 12284 | 2020-04-21 06:04:23 |
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 q12020exhibit992018.jpg | 93638 | 2020-04-21 06:04:23 |
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 q12020exhibit992020.jpg | 94309 | 2020-04-21 06:04:23 |
 q12020exhibit992021.jpg | 134635 | 2020-04-21 06:04:23 |
| R1.htm | 38626 | 2020-04-21 06:04:23 |
| report.css | 2767 | 2020-04-21 06:04:23 |
| Show.js | 1085 | 2020-04-21 06:04:23 |