Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-20-000016-index-headers.html | 2020-04-15 07:57:32 | |
| 0001101302-20-000016-index.html | 2020-04-15 07:57:32 | |
| 0001101302-20-000016.txt | 2020-04-15 07:57:32 | |
 0001101302-20-000016-xbrl.zip | 13792 | 2020-04-15 07:57:32 |
 entegrislogoa421.gif | 12284 | 2020-04-15 07:57:32 |
| entg-20200415.htm | 49274 | 2020-04-15 07:57:32 |
| entg-20200415.xsd | 2520 | 2020-04-15 07:57:32 |
| entg-20200415_cal.xml | 803 | 2020-04-15 07:57:32 |
| entg-20200415_def.xml | 1767 | 2020-04-15 07:57:32 |
| entg-20200415_htm.xml | 10740 | 2020-04-15 07:57:32 |
| entg-20200415_lab.xml | 24275 | 2020-04-15 07:57:32 |
| entg-20200415_pre.xml | 12739 | 2020-04-15 07:57:32 |
| FilingSummary.xml | 1822 | 2020-04-15 07:57:32 |
| Financial_Report.xlsx | 5790 | 2020-04-15 07:57:32 |
| MetaLinks.json | 18038 | 2020-04-15 07:57:32 |
| pressreleaseannouncing.htm | 6846 | 2020-04-15 07:57:32 |
| R1.htm | 38628 | 2020-04-15 07:57:32 |
| report.css | 2767 | 2020-04-15 07:57:32 |
| Show.js | 1085 | 2020-04-15 07:57:32 |