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| 0001101302-20-000006-index.html | 2020-01-15 10:43:48 | |
| 0001101302-20-000006.txt | 2020-01-15 10:43:48 | |
 0001101302-20-000006-xbrl.zip | 14196 | 2020-01-15 10:43:48 |
 entegrislogoa42.gif | 12284 | 2020-01-15 10:43:48 |
| entg-20200115.xsd | 4666 | 2020-01-15 10:43:48 |
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| entg-20200115_def.xml | 1551 | 2020-01-15 10:43:48 |
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| Financial_Report.xlsx | 5784 | 2020-01-15 10:43:48 |
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| R1.htm | 38628 | 2020-01-15 10:43:48 |
| report.css | 2767 | 2020-01-15 10:43:48 |
| Show.js | 1084 | 2020-01-15 10:43:48 |