Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-20-000003-index-headers.html | 2020-01-10 07:36:52 | |
| 0001101302-20-000003-index.html | 2020-01-10 07:36:52 | |
| 0001101302-20-000003.txt | 2020-01-10 07:36:52 | |
 0001101302-20-000003-xbrl.zip | 15868 | 2020-01-10 07:36:52 |
 entegrislogoa41.gif | 12284 | 2020-01-10 07:36:52 |
| entg-20200110.xsd | 4666 | 2020-01-10 07:36:52 |
| entg-20200110_cal.xml | 701 | 2020-01-10 07:36:52 |
| entg-20200110_def.xml | 1551 | 2020-01-10 07:36:52 |
| entg-20200110_lab.xml | 26142 | 2020-01-10 07:36:52 |
| entg-20200110_pre.xml | 13657 | 2020-01-10 07:36:52 |
| entgform8-kprojectsimba.htm | 44989 | 2020-01-10 07:36:52 |
| entgform8-kprojectsimba_htm.xml | 4275 | 2020-01-10 07:36:52 |
| FilingSummary.xml | 1857 | 2020-01-10 07:36:52 |
| Financial_Report.xlsx | 5785 | 2020-01-10 07:36:52 |
| MetaLinks.json | 19073 | 2020-01-10 07:36:52 |
| pressreleaseannouncing.htm | 15007 | 2020-01-10 07:36:52 |
| R1.htm | 38628 | 2020-01-10 07:36:52 |
| report.css | 2767 | 2020-01-10 07:36:52 |
| Show.js | 1085 | 2020-01-10 07:36:52 |