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|---|---|---|
 0001101302-19-000038-index-headers.html | 2019-10-16 08:05:54 | |
| 0001101302-19-000038-index.html | 2019-10-16 08:05:54 | |
| 0001101302-19-000038.txt | 2019-10-16 08:05:54 | |
 0001101302-19-000038-xbrl.zip | 14202 | 2019-10-16 08:05:54 |
 entegrislogoa39.gif | 12284 | 2019-10-16 08:05:54 |
| entg-20191016.xsd | 4666 | 2019-10-16 08:05:54 |
| entg-20191016_cal.xml | 701 | 2019-10-16 08:05:54 |
| entg-20191016_def.xml | 1551 | 2019-10-16 08:05:54 |
| entg-20191016_lab.xml | 26142 | 2019-10-16 08:05:54 |
| entg-20191016_pre.xml | 13657 | 2019-10-16 08:05:54 |
| entgform8-kq4dividend.htm | 44729 | 2019-10-16 08:05:54 |
| entgform8-kq4dividend_htm.xml | 4134 | 2019-10-16 08:05:54 |
| FilingSummary.xml | 1846 | 2019-10-16 08:05:54 |
| Financial_Report.xlsx | 5785 | 2019-10-16 08:05:54 |
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| pressreleaseannouncing.htm | 7552 | 2019-10-16 08:05:54 |
| R1.htm | 38623 | 2019-10-16 08:05:54 |
| report.css | 2767 | 2019-10-16 08:05:54 |
| Show.js | 1084 | 2019-10-16 08:05:54 |