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| 0001101302-19-000032-index.html | 2019-07-25 16:26:44 | |
| 0001101302-19-000032.txt | 2019-07-25 16:26:44 | |
 0001101302-19-000032-xbrl.zip | 207285 | 2019-07-25 16:26:44 |
| entg-20190629.xsd | 33292 | 2019-07-25 16:26:44 |
| entg-20190629_cal.xml | 83563 | 2019-07-25 16:26:44 |
| entg-20190629_def.xml | 191020 | 2019-07-25 16:26:44 |
| entg-20190629_lab.xml | 451379 | 2019-07-25 16:26:44 |
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| entg-2019629x10q_htm.xml | 1498818 | 2019-07-25 16:26:44 |
| entg-2019629xex311.htm | 10579 | 2019-07-25 16:26:44 |
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| entg-2019629xex321.htm | 7398 | 2019-07-25 16:26:44 |
| FilingSummary.xml | 31284 | 2019-07-25 16:26:44 |
| Financial_Report.xlsx | 64521 | 2019-07-25 16:26:44 |
| MetaLinks.json | 435127 | 2019-07-25 16:26:44 |
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| report.css | 2767 | 2019-07-25 16:26:44 |
| Show.js | 1085 | 2019-07-25 16:26:44 |