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| 0001101302-19-000017-index.html | 2019-04-25 15:08:10 | |
| 0001101302-19-000017.txt | 2019-04-25 15:08:10 | |
 0001101302-19-000017-xbrl.zip | 154563 | 2019-04-25 15:08:10 |
| entg-20190330.xml | 1189252 | 2019-04-25 15:08:10 |
| entg-20190330.xsd | 33439 | 2019-04-25 15:08:10 |
| entg-20190330_cal.xml | 82155 | 2019-04-25 15:08:10 |
| entg-20190330_def.xml | 199768 | 2019-04-25 15:08:10 |
| entg-20190330_lab.xml | 442628 | 2019-04-25 15:08:10 |
| entg-20190330_pre.xml | 293978 | 2019-04-25 15:08:10 |
| entg-2019330x10q.htm | 968606 | 2019-04-25 15:08:10 |
| entg-2019330xex311.htm | 10580 | 2019-04-25 15:08:10 |
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| entg-2019330xex321.htm | 7400 | 2019-04-25 15:08:10 |
| FilingSummary.xml | 31140 | 2019-04-25 15:08:10 |
| Financial_Report.xlsx | 60657 | 2019-04-25 15:08:10 |
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| report.css | 2767 | 2019-04-25 15:08:10 |
| Show.js | 1085 | 2019-04-25 15:08:10 |