Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-14-000013-index-headers.html | 2014-08-04 19:34:48 | |
| 0001101302-14-000013-index.html | 2014-08-04 19:34:48 | |
| 0001101302-14-000013.txt | 2014-08-04 19:34:48 | |
 0001101302-14-000013-xbrl.zip | 173073 | 2014-08-04 19:34:48 |
| entg-20140628.xml | 1170843 | 2014-08-04 19:34:48 |
| entg-20140628.xsd | 38557 | 2014-08-04 19:34:48 |
| entg-20140628_cal.xml | 76133 | 2014-08-04 19:34:48 |
| entg-20140628_def.xml | 280748 | 2014-08-04 19:34:48 |
| entg-20140628_lab.xml | 519519 | 2014-08-04 19:34:48 |
| entg-20140628_pre.xml | 341734 | 2014-08-04 19:34:48 |
| entg-2014628x10q.htm | 1161493 | 2014-08-04 19:34:48 |
| entg-2014628xex311.htm | 10543 | 2014-08-04 19:34:48 |
| entg-2014628xex312.htm | 10786 | 2014-08-04 19:34:48 |
| entg-2014628xex321.htm | 7362 | 2014-08-04 19:34:48 |
| FilingSummary.xml | 26290 | 2014-08-04 19:34:48 |
| Financial_Report.xls | 1006787 | 2014-08-04 19:34:48 |
| Financial_Report.xlsx | 155948 | 2014-08-04 19:34:48 |
| R1.htm | 28803 | 2014-08-04 19:34:48 |
| R10.htm | 79811 | 2014-08-04 19:34:48 |
| R11.htm | 43471 | 2014-08-04 19:34:48 |
| R12.htm | 19477 | 2014-08-04 19:34:48 |
| R13.htm | 44658 | 2014-08-04 19:34:48 |
| R14.htm | 16049 | 2014-08-04 19:34:48 |
| R15.htm | 13781 | 2014-08-04 19:34:48 |
| R16.htm | 34805 | 2014-08-04 19:34:48 |
| R17.htm | 28759 | 2014-08-04 19:34:48 |
| R18.htm | 120417 | 2014-08-04 19:34:48 |
| R19.htm | 99385 | 2014-08-04 19:34:48 |
| R2.htm | 117465 | 2014-08-04 19:34:48 |
| R20.htm | 22631 | 2014-08-04 19:34:48 |
| R21.htm | 55984 | 2014-08-04 19:34:48 |
| R22.htm | 48903 | 2014-08-04 19:34:48 |
| R23.htm | 18270 | 2014-08-04 19:34:48 |
| R24.htm | 20855 | 2014-08-04 19:34:48 |
| R25.htm | 11705 | 2014-08-04 19:34:48 |
| R26.htm | 11876 | 2014-08-04 19:34:48 |
| R27.htm | 31650 | 2014-08-04 19:34:48 |
| R28.htm | 28829 | 2014-08-04 19:34:48 |
| R29.htm | 122759 | 2014-08-04 19:34:48 |
| R3.htm | 34277 | 2014-08-04 19:34:48 |
| R30.htm | 93189 | 2014-08-04 19:34:48 |
| R31.htm | 74990 | 2014-08-04 19:34:48 |
| R32.htm | 16549 | 2014-08-04 19:34:48 |
| R33.htm | 36430 | 2014-08-04 19:34:48 |
| R34.htm | 14704 | 2014-08-04 19:34:48 |
| R35.htm | 18426 | 2014-08-04 19:34:48 |
| R36.htm | 9373 | 2014-08-04 19:34:48 |
| R37.htm | 16065 | 2014-08-04 19:34:48 |
| R38.htm | 5601 | 2014-08-04 19:34:48 |
| R39.htm | 19740 | 2014-08-04 19:34:48 |
| R4.htm | 67907 | 2014-08-04 19:34:48 |
| R40.htm | 8196 | 2014-08-04 19:34:48 |
| R41.htm | 15528 | 2014-08-04 19:34:48 |
| R42.htm | 22405 | 2014-08-04 19:34:48 |
| R43.htm | 73823 | 2014-08-04 19:34:48 |
| R44.htm | 23665 | 2014-08-04 19:34:48 |
| R45.htm | 5917 | 2014-08-04 19:34:48 |
| R46.htm | 16538 | 2014-08-04 19:34:48 |
| R47.htm | 22034 | 2014-08-04 19:34:48 |
| R48.htm | 8498 | 2014-08-04 19:34:48 |
| R49.htm | 12784 | 2014-08-04 19:34:48 |
| R5.htm | 24544 | 2014-08-04 19:34:48 |
| R50.htm | 7167 | 2014-08-04 19:34:48 |
| R51.htm | 52792 | 2014-08-04 19:34:48 |
| R52.htm | 14013 | 2014-08-04 19:34:48 |
| R53.htm | 6212 | 2014-08-04 19:34:48 |
| R54.htm | 18446 | 2014-08-04 19:34:48 |
| R55.htm | 31056 | 2014-08-04 19:34:48 |
| R6.htm | 6123 | 2014-08-04 19:34:48 |
| R7.htm | 57613 | 2014-08-04 19:34:48 |
| R8.htm | 113934 | 2014-08-04 19:34:48 |
| R9.htm | 12768 | 2014-08-04 19:34:48 |
| report.css | 2740 | 2014-08-04 19:34:48 |
| Show.js | 1410 | 2014-08-04 19:34:48 |