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|---|---|---|
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| 0001101302-14-000004-index.html | 2014-05-05 09:55:09 | |
| 0001101302-14-000004.txt | 2014-05-05 09:55:09 | |
 0001101302-14-000004-xbrl.zip | 94356 | 2014-05-05 09:55:09 |
| entg-20140329.xml | 533022 | 2014-05-05 09:55:09 |
| entg-20140329.xsd | 19690 | 2014-05-05 09:55:09 |
| entg-20140329_cal.xml | 49830 | 2014-05-05 09:55:09 |
| entg-20140329_def.xml | 180296 | 2014-05-05 09:55:09 |
| entg-20140329_lab.xml | 304411 | 2014-05-05 09:55:09 |
| entg-20140329_pre.xml | 205839 | 2014-05-05 09:55:09 |
| entg-2014329x10q.htm | 663694 | 2014-05-05 09:55:09 |
| entg-2014329xex3111.htm | 10582 | 2014-05-05 09:55:09 |
| entg-2014329xex3121.htm | 10826 | 2014-05-05 09:55:09 |
| entg-2014329xex3211.htm | 7281 | 2014-05-05 09:55:09 |
| FilingSummary.xml | 14703 | 2014-05-05 09:55:09 |
| Financial_Report.xls | 431960 | 2014-05-05 09:55:09 |
| Financial_Report.xlsx | 72817 | 2014-05-05 09:55:09 |
| R1.htm | 28803 | 2014-05-05 09:55:09 |
| R10.htm | 17540 | 2014-05-05 09:55:09 |
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| R7.htm | 92020 | 2014-05-05 09:55:09 |
| R8.htm | 9515 | 2014-05-05 09:55:09 |
| R9.htm | 16868 | 2014-05-05 09:55:09 |
| report.css | 2740 | 2014-05-05 09:55:09 |
| Show.js | 1410 | 2014-05-05 09:55:09 |