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| 0001101302-13-000004-index.html | 2013-07-26 17:04:30 | |
| 0001101302-13-000004.txt | 2013-07-26 17:04:30 | |
 0001101302-13-000004-xbrl.zip | 106422 | 2013-07-26 17:04:30 |
| entg-20130629.xml | 686151 | 2013-07-26 17:04:30 |
| entg-20130629.xsd | 22423 | 2013-07-26 17:04:30 |
| entg-20130629_cal.xml | 56125 | 2013-07-26 17:04:30 |
| entg-20130629_def.xml | 175351 | 2013-07-26 17:04:30 |
| entg-20130629_lab.xml | 319935 | 2013-07-26 17:04:30 |
| entg-20130629_pre.xml | 212144 | 2013-07-26 17:04:30 |
| entg-2013629x10q.htm | 892052 | 2013-07-26 17:04:30 |
| entg-2013629xex311.htm | 10584 | 2013-07-26 17:04:30 |
| entg-2013629xex312.htm | 10827 | 2013-07-26 17:04:30 |
| entg-2013629xex321.htm | 7282 | 2013-07-26 17:04:30 |
| FilingSummary.xml | 16918 | 2013-07-26 17:04:30 |
| Financial_Report.xls | 559880 | 2013-07-26 17:04:30 |
| R1.htm | 28803 | 2013-07-26 17:04:30 |
| R1.xml | 29307 | 2013-07-26 17:04:30 |
| R10.htm | 17400 | 2013-07-26 17:04:30 |
| R10.xml | 19647 | 2013-07-26 17:04:30 |
| R11.htm | 28459 | 2013-07-26 17:04:30 |
| R11.xml | 32085 | 2013-07-26 17:04:30 |
| R12.htm | 105926 | 2013-07-26 17:04:30 |
| R12.xml | 120824 | 2013-07-26 17:04:30 |
| R13.htm | 79980 | 2013-07-26 17:04:30 |
| R13.xml | 90684 | 2013-07-26 17:04:30 |
| R14.htm | 32566 | 2013-07-26 17:04:30 |
| R14.xml | 29598 | 2013-07-26 17:04:30 |
| R15.htm | 18733 | 2013-07-26 17:04:30 |
| R15.xml | 19834 | 2013-07-26 17:04:30 |
| R16.htm | 15653 | 2013-07-26 17:04:30 |
| R16.xml | 18035 | 2013-07-26 17:04:30 |
| R17.htm | 29919 | 2013-07-26 17:04:30 |
| R17.xml | 33019 | 2013-07-26 17:04:30 |
| R18.htm | 109502 | 2013-07-26 17:04:30 |
| R18.xml | 122753 | 2013-07-26 17:04:30 |
| R19.htm | 76857 | 2013-07-26 17:04:30 |
| R19.xml | 86671 | 2013-07-26 17:04:30 |
| R2.htm | 124264 | 2013-07-26 17:04:30 |
| R2.xml | 112035 | 2013-07-26 17:04:30 |
| R20.htm | 16686 | 2013-07-26 17:04:30 |
| R20.xml | 17781 | 2013-07-26 17:04:30 |
| R21.htm | 22896 | 2013-07-26 17:04:30 |
| R21.xml | 23464 | 2013-07-26 17:04:30 |
| R22.htm | 43736 | 2013-07-26 17:04:30 |
| R22.xml | 60104 | 2013-07-26 17:04:30 |
| R23.htm | 19846 | 2013-07-26 17:04:30 |
| R23.xml | 20771 | 2013-07-26 17:04:30 |
| R24.htm | 6564 | 2013-07-26 17:04:30 |
| R24.xml | 8715 | 2013-07-26 17:04:30 |
| R25.htm | 17469 | 2013-07-26 17:04:30 |
| R25.xml | 24077 | 2013-07-26 17:04:30 |
| R26.htm | 9249 | 2013-07-26 17:04:30 |
| R26.xml | 14749 | 2013-07-26 17:04:30 |
| R27.htm | 47224 | 2013-07-26 17:04:30 |
| R27.xml | 241277 | 2013-07-26 17:04:30 |
| R28.htm | 20551 | 2013-07-26 17:04:30 |
| R28.xml | 31203 | 2013-07-26 17:04:30 |
| R29.htm | 13595 | 2013-07-26 17:04:30 |
| R29.xml | 62932 | 2013-07-26 17:04:30 |
| R3.htm | 38634 | 2013-07-26 17:04:30 |
| R3.xml | 39665 | 2013-07-26 17:04:30 |
| R30.htm | 21194 | 2013-07-26 17:04:30 |
| R30.xml | 30585 | 2013-07-26 17:04:30 |
| R4.htm | 73003 | 2013-07-26 17:04:30 |
| R4.xml | 89590 | 2013-07-26 17:04:30 |
| R5.htm | 28919 | 2013-07-26 17:04:30 |
| R5.xml | 37166 | 2013-07-26 17:04:30 |
| R6.htm | 62099 | 2013-07-26 17:04:30 |
| R6.xml | 277731 | 2013-07-26 17:04:30 |
| R7.htm | 112893 | 2013-07-26 17:04:30 |
| R7.xml | 111598 | 2013-07-26 17:04:30 |
| R8.htm | 12928 | 2013-07-26 17:04:30 |
| R8.xml | 13636 | 2013-07-26 17:04:30 |
| R9.htm | 31034 | 2013-07-26 17:04:30 |
| R9.xml | 33452 | 2013-07-26 17:04:30 |
| report.css | 2740 | 2013-07-26 17:04:30 |
| Show.js | 1410 | 2013-07-26 17:04:30 |