Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-22-203468-index-headers.html | 2022-07-27 16:31:33 | |
| 0001193125-22-203468-index.html | 2022-07-27 16:31:33 | |
| 0001193125-22-203468.txt | 2022-07-27 16:31:33 | |
 0001193125-22-203468-xbrl.zip | 23710 | 2022-07-27 16:31:33 |
| d330181d8k.htm | 25067 | 2022-07-27 16:31:33 |
| d330181d8k_htm.xml | 3373 | 2022-07-27 16:31:33 |
| d330181dex991.htm | 282713 | 2022-07-27 16:31:33 |
| FilingSummary.xml | 1731 | 2022-07-27 16:31:33 |
| Financial_Report.xlsx | 5698 | 2022-07-27 16:31:33 |
 g330181g0727183304036.jpg | 1636 | 2022-07-27 16:31:33 |
| MetaLinks.json | 18323 | 2022-07-27 16:31:33 |
| mksi-20220727.xsd | 2858 | 2022-07-27 16:31:33 |
| mksi-20220727_lab.xml | 17996 | 2022-07-27 16:31:33 |
| mksi-20220727_pre.xml | 11263 | 2022-07-27 16:31:33 |
| R1.htm | 40080 | 2022-07-27 16:31:33 |
| report.css | 2767 | 2022-07-27 16:31:33 |
| Show.js | 1085 | 2022-07-27 16:31:33 |