Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-22-147525-index-headers.html | 2022-05-11 16:16:08 | |
| 0001193125-22-147525-index.html | 2022-05-11 16:16:08 | |
| 0001193125-22-147525.txt | 2022-05-11 16:16:08 | |
 0001193125-22-147525-xbrl.zip | 30497 | 2022-05-11 16:16:08 |
| d324844d8k.htm | 39137 | 2022-05-11 16:16:08 |
| d324844d8k_htm.xml | 3373 | 2022-05-11 16:16:08 |
| d324844dex102.htm | 33305 | 2022-05-11 16:16:08 |
| d324844dex103.htm | 58113 | 2022-05-11 16:16:08 |
| FilingSummary.xml | 1766 | 2022-05-11 16:16:08 |
| Financial_Report.xlsx | 5674 | 2022-05-11 16:16:08 |
| MetaLinks.json | 18293 | 2022-05-11 16:16:08 |
| mksi-20220510.xsd | 2858 | 2022-05-11 16:16:08 |
| mksi-20220510_lab.xml | 17996 | 2022-05-11 16:16:08 |
| mksi-20220510_pre.xml | 11263 | 2022-05-11 16:16:08 |
| R1.htm | 40240 | 2022-05-11 16:16:08 |
| report.css | 2767 | 2022-05-11 16:16:08 |
| Show.js | 1085 | 2022-05-11 16:16:08 |